The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technolog......

The spectrally selective absorbing film plays a key role in determining the collecting capability of solar thermal en-er......

线性渐变透过率薄膜元件是光刻系统中光可变衰减器的关键元件。采用电子束蒸发实现了近线性248 nm渐变透过率光学薄膜的设计与制备......

在2003年11月28～31日于日本YoKohama举办的FPD展览会上展示了最大尺寸的aSi淀积基板,这种基板可满足在一块基板上生产40英寸电视的......